Open AccessUsing the Atomic-Layer-Deposited method to obtain LiFePO4 fi lm: The infl uence of process conditions on the phase composition of the fi lm
Author(s) -
A. V. Dolganov,
O.Y. Chernyaeva,
E. N. Lyutova,
V. M. Kyashkin,
К. Н. Нищев
Publication year - 2017
Publication title -
applied solid state chemistry
Language(s) - English
Resource type - Journals
ISSN - 2619-0141
DOI - 10.18572/2619-0141-2017-1-1-14-19
Subject(s) - layer (electronics) , composition (language) , materials science , process (computing) , phase (matter) , atomic layer deposition , analytical chemistry (journal) , chemical engineering , nanotechnology , chemistry , computer science , chromatography , engineering , art , organic chemistry , operating system , literature