Open AccessCHEMICAL DISSOLUTION InAs, InSb, GaAs AND GaSb IN THE (NH4)2Cr2O7−HBr−H2O ETCHING COMPOSITIONS
Author(s) -
Iryna Levchenko,
Vasyl Tomashyk,
I. B. Stratiychuk,
G. P. Malanych,
A. A. Korchovyi
Publication year - 2017
Publication title -
vìsnik odesʹkogo nacìonalʹnogo unìversitetu. hìmìâ
Language(s) - English
Resource type - Journals
eISSN - 2414-5963
pISSN - 2304-0947
DOI - 10.18524/2304-0947.2017.3(63).109390
Subject(s) - dissolution , polishing , etching (microfabrication) , chemical mechanical planarization , isotropic etching , materials science , diffusion , atomic force microscopy , analytical chemistry (journal) , chemical engineering , chemistry , metallurgy , nanotechnology , layer (electronics) , chromatography , physics , thermodynamics , engineering