Open AccessGAS ANALISIS SYSTEM BASED ON THE POROUS SILICON STRUCTURES
Author(s) -
Л. С. Монастирський,
І. Б. Оленич,
О. І. Петришин,
В. М. Лозинський
Publication year - 2018
Publication title -
sensorna elektronìka ì mìkrosistemnì tehnologìï
Language(s) - English
Resource type - Journals
eISSN - 2415-3508
pISSN - 1815-7459
DOI - 10.18524/1815-7459.2018.2.136891
Subject(s) - porous silicon , materials science , nanoclusters , silicon , porosity , nanostructure , adsorption , nanotechnology , electrochemical gas sensor , chemical engineering , selectivity , porous medium , silicon oxide , molecule , deposition (geology) , electrochemistry , optoelectronics , chemistry , composite material , catalysis , organic chemistry , electrode , paleontology , silicon nitride , engineering , sediment , biology