Open AccessPHYSICAL PROCESSES THAT DETERMINE THE BEHAVIOR OF CURRENT IN n-ZnO/p-Si HETEROJUNCTIONS CREATED BY RF MAGNETRON SPUTTERING
Author(s) -
В. В. Хомяк
Publication year - 2018
Publication title -
sensorna elektronìka ì mìkrosistemnì tehnologìï
Language(s) - English
Resource type - Journals
eISSN - 2415-3508
pISSN - 1815-7459
DOI - 10.18524/1815-7459.2018.2.136882
Subject(s) - heterojunction , materials science , sputtering , sputter deposition , optoelectronics , thin film , argon , cavity magnetron , current (fluid) , oxygen , nanotechnology , chemistry , electrical engineering , organic chemistry , engineering