Open AccessH2 O2 SENSOR BASED ON MOSFET WITH ACTIVE BACK-GATE PART OF SUBSTRATE
Author(s) -
Oksana Yuriivna Kutova,
Mykhailo Dusheiko,
Tetyana Obukhova,
N. Maksimchuk,
T. I. Borodinova,
V. Tymofeev
Publication year - 2017
Publication title -
sensorna elektronìka ì mìkrosistemnì tehnologìï
Language(s) - English
Resource type - Journals
eISSN - 2415-3508
pISSN - 1815-7459
DOI - 10.18524/1815-7459.2017.4.116007
Subject(s) - mosfet , substrate (aquarium) , sensitivity (control systems) , nanoparticle , materials science , catalysis , dimension (graph theory) , nanotechnology , optoelectronics , electronic engineering , electrical engineering , chemistry , transistor , engineering , mathematics , voltage , biochemistry , oceanography , geology , pure mathematics