Open AccessFORMATION OF NANOPOROUS Al2O3 FILMS
Author(s) -
А. Ю. Кизяк,
А. А. Євтух,
O. Steblova
Publication year - 2016
Publication title -
sensorna elektronìka ì mìkrosistemnì tehnologìï
Language(s) - English
Resource type - Journals
eISSN - 2415-3508
pISSN - 1815-7459
DOI - 10.18524/1815-7459.2016.4.86662
Subject(s) - nanoporous , anodizing , oxalic acid , materials science , phosphoric acid , porosity , chemical engineering , aluminium , nanotechnology , composite material , inorganic chemistry , chemistry , metallurgy , engineering