Open AccessINVESTIGATION OF CAPACITIVE CONVERTERS STRUCTURE BASED ON Al/ITO/POLYIMIDE/Al2O3 THIN-FILM COMPOSITION
Author(s) -
Л. В. Зайцева,
Г.С. Хрипунов,
Р. В. Зайцев,
Борис Митрофанович Горкунов,
А. Л. Хрипунова
Publication year - 2015
Publication title -
sensorna elektronìka ì mìkrosistemnì tehnologìï
Language(s) - English
Resource type - Journals
eISSN - 2415-3508
pISSN - 1815-7459
DOI - 10.18524/1815-7459.2015.2.73666
Subject(s) - polyimide , capacitive sensing , materials science , transducer , thin film , optoelectronics , converters , composite material , electrical engineering , nanotechnology , layer (electronics) , engineering , voltage