Open AccessSENSORS ELECTRONICS AND MICROSYSTEMS TECHNOLOGIES. STATE AND PROSPECTS
Author(s) -
Я. И. Лепих,
V. Litovchenko,
В. А. Сминтина
Publication year - 2014
Publication title -
sensorna elektronìka ì mìkrosistemnì tehnologìï
Language(s) - English
Resource type - Journals
eISSN - 2415-3508
pISSN - 1815-7459
DOI - 10.18524/1815-7459.2014.4.108306
Subject(s) - microsystem , electronics , engineering , systems engineering , scientific instrument , nanotechnology , electrical engineering , materials science , physics , quantum mechanics