Open AccessTHE USAGE OF DYNAMIC CAPACITOR METHOD IN THE SEMICONDUCTOR SENSORS AND ACTUATORS
Author(s) -
Ю. С. Жарких,
С. В. Лисоченко,
О. В. Третяк
Publication year - 2013
Publication title -
sensor electronics and microsystem technologies
Language(s) - English
Resource type - Journals
eISSN - 2415-3508
pISSN - 1815-7459
DOI - 10.18524/1815-7459.2013.3.109693
Subject(s) - capacitor , semiconductor , materials science , dielectric , insulator (electricity) , optoelectronics , surface charge , voltage , desorption , electronic engineering , adsorption , electrical engineering , chemistry , engineering , organic chemistry
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