Open AccessFABRICATION OF CERAMIC POWDERS SiC AND Si3N4 USING CO2-LASER
Author(s) -
Ш. Д. Курмашев,
А. Н. Софронков,
Т. М. Бугайова,
Tatyana Lavrenova,
Н. С. Дзюба
Publication year - 2012
Publication title -
sensorna elektronìka ì mìkrosistemnì tehnologìï
Language(s) - English
Resource type - Journals
eISSN - 2415-3508
pISSN - 1815-7459
DOI - 10.18524/1815-7459.2012.4.115154
Subject(s) - materials science , silicon carbide , ceramic , silicon nitride , fabrication , reagent , carbide , silane , laser , nitride , silicon , ammonia , ethylene diamine , chemical engineering , metallurgy , nanotechnology , composite material , optics , chemistry , layer (electronics) , nuclear chemistry , organic chemistry , medicine , alternative medicine , physics , pathology , engineering