Open AccessHIGH PRECISION INTERFEROMETRIC THICKNESS ANALYSIS OF SUB-MICROMETERS SPIN-COATED POLYEPOXYPROPYLCARBAZOLE FILMS
Author(s) -
А. Ю. Мєшалкін,
Vladimir Abashkin,
А. М. Прісакар,
Г. М. Тридух,
И. С. Андрієш,
Л. П. Бєц,
E.I. Akimova
Publication year - 2012
Publication title -
sensorna elektronìka ì mìkrosistemnì tehnologìï
Language(s) - English
Resource type - Journals
eISSN - 2415-3508
pISSN - 1815-7459
DOI - 10.18524/1815-7459.2012.3.114659
Subject(s) - materials science , interferometry , polymer , spin coating , thin film , optics , range (aeronautics) , spin (aerodynamics) , nanotechnology , composite material , physics , thermodynamics