Open AccessPIEZORESISTIVE PRESSURE SENSORS BASED ON SILICON WHISKERS
Author(s) -
А. О. Дружинін,
І. Й. Мар’ямова,
О. П. Кутраков,
Н. С. Лях-Кагуй
Publication year - 2012
Publication title -
sensorna elektronìka ì mìkrosistemnì tehnologìï
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2415-3508
pISSN - 1815-7459
DOI - 10.18524/1815-7459.2012.3.114538
Subject(s) - piezoresistive effect , materials science , whiskers , silicon , pressure sensor , strain gauge , microelectromechanical systems , composite material , optoelectronics , pressure measurement , mechanical engineering , engineering