Open AccessFEM SIMULATION OF PIEZORESISTIVE PRESSURE MODULE
Author(s) -
V.A. Gridchin,
Michail A. Chebanov
Publication year - 2010
Publication title -
sensorna elektronìka ì mìkrosistemnì tehnologìï
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2415-3508
pISSN - 1815-7459
DOI - 10.18524/1815-7459.2010.4.116319
Subject(s) - piezoresistive effect , finite element method , stress (linguistics) , interface (matter) , materials science , gravitational singularity , singularity , silicon , structural engineering , composite material , engineering , mathematics , geometry , mathematical analysis , optoelectronics , linguistics , philosophy , capillary number , capillary action