
NANOSCALE MATERIALS IN MODERN MICROSYSTEM TEHNOLOGY
Author(s) -
An. Morozovska,
George S. Svechnikov
Publication year - 2010
Publication title -
sensorna elektronìka ì mìkrosistemnì tehnologìï
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2415-3508
pISSN - 1815-7459
DOI - 10.18524/1815-7459.2010.3.114464
Subject(s) - nanoelectronics , nanotechnology , microsystem , nanoscopic scale , materials science , nanowire