Open AccessTHE DEVELOPMENT OF ITO FILM ELECTRODES FOR OPTOELECTRONIC DEVICES
Author(s) -
K. Y. Krikun,
G. S. Khrypunov,
N. A. Kovtun,
Е. К. Белоногов
Publication year - 2009
Publication title -
sensorna elektronìka ì mìkrosistemnì tehnologìï
Language(s) - English
Resource type - Journals
eISSN - 2415-3508
pISSN - 1815-7459
DOI - 10.18524/1815-7459.2009.1.115369
Subject(s) - materials science , substrate (aquarium) , sputter deposition , optoelectronics , cavity magnetron , electrode , deposition (geology) , thin film , ohm , sputtering , nanotechnology , electrical engineering , chemistry , paleontology , oceanography , engineering , sediment , geology , biology