Open AccessPHYSICAL SENSORS BASED ON SILICON- ON- INSULATOR STRUCTURES WITH RECRYSTALLIZED POLYSILICON LAYER
Author(s) -
A. A. Druzhinin,
І. I. Maryamova,
Igor Kogut,
Yuriy Khoverko
Publication year - 2008
Publication title -
sensorna elektronìka ì mìkrosistemnì tehnologìï
Language(s) - English
Resource type - Journals
eISSN - 2415-3508
pISSN - 1815-7459
DOI - 10.18524/1815-7459.2008.4.115093
Subject(s) - microelectronics , materials science , piezoresistive effect , silicon on insulator , silicon , optoelectronics , capacitive sensing , insulator (electricity) , composite material , electrical engineering , engineering