PYSICAL ASPECTS OF LOW-TEMPERATURE MECHANICAL SENSORS BASED ON SILICON MICROCRYSTALS | Zendy

Anatoly Druzhinin | Zendy; І. I. Maryamova | Zendy; О. П. Кутраков | Zendy; I. V. Pavlovskyy | Zendy

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PYSICAL ASPECTS OF LOW-TEMPERATURE MECHANICAL SENSORS BASED ON SILICON MICROCRYSTALS

Author(s) -

Anatoly Druzhinin,

І. I. Maryamova,

О. П. Кутраков,

I. V. Pavlovskyy

Publication year - 2014

Publication title -

sensor electronics and microsystem technologies

Language(s) - English

Resource type - Journals

eISSN - 2415-3508

pISSN - 1815-7459

DOI - 10.18524/1815-7459.2006.3.112460

Subject(s) - piezoresistive effect , materials science , gauge factor , magnetoresistance , condensed matter physics , boron , strain gauge , electrical resistivity and conductivity , silicon , atmospheric temperature range , conductivity , doping , strain (injury) , magnetometer , magnetic field , composite material , optoelectronics , electrical engineering , thermodynamics , medicine , chemistry , alternative medicine , physics , organic chemistry , pathology , engineering , quantum mechanics , fabrication

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