Open AccessPYSICAL ASPECTS OF LOW-TEMPERATURE MECHANICAL SENSORS BASED ON SILICON MICROCRYSTALS
Author(s) -
Anatoly Druzhinin,
І. I. Maryamova,
О. П. Кутраков,
I. V. Pavlovskyy
Publication year - 2014
Publication title -
sensorna elektronìka ì mìkrosistemnì tehnologìï
Language(s) - English
Resource type - Journals
eISSN - 2415-3508
pISSN - 1815-7459
DOI - 10.18524/1815-7459.2006.3.112460
Subject(s) - piezoresistive effect , materials science , gauge factor , magnetoresistance , condensed matter physics , boron , strain gauge , electrical resistivity and conductivity , silicon , atmospheric temperature range , conductivity , doping , strain (injury) , magnetometer , magnetic field , composite material , optoelectronics , electrical engineering , thermodynamics , medicine , chemistry , alternative medicine , physics , organic chemistry , pathology , engineering , quantum mechanics , fabrication