Open AccessDESIGN OF SILICON MICROPROBE FOR MINIMALLY INVASIVE NEURAL INTERFACE
Author(s) -
E Yu Gusev,
Artur V. Saryev
Publication year - 2021
Publication title -
izvestiâ ûfu. tehničeskie nauki
Language(s) - English
Resource type - Journals
eISSN - 2311-3103
pISSN - 1999-9429
DOI - 10.18522/2311-3103-2021-3-121-127
Subject(s) - microprobe , etching (microfabrication) , silicon , electrode , materials science , surface micromachining , anisotropy , base (topology) , bulk micromachining , optics , analytical chemistry (journal) , optoelectronics , composite material , chemistry , mineralogy , fabrication , physics , mathematics , medicine , mathematical analysis , alternative medicine , layer (electronics) , pathology , chromatography