Open AccessInfluence of Argon Pressure on Texture and Microstructure of Cobalt Films Produced by Dc-Sputtering
Author(s) -
A. S. Dzhumaliev,
Yu. V. Nikulin
Publication year - 2017
Publication title -
izvestiâ saratovskogo universiteta. novaâ seriâ. seriâ fizika
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.163
H-Index - 2
eISSN - 2542-193X
pISSN - 1817-3020
DOI - 10.18500/1817-3020-2017-17-4-254-262
Subject(s) - microstructure , texture (cosmology) , argon , sputtering , cobalt , materials science , metallurgy , composite material , thin film , chemistry , nanotechnology , computer science , artificial intelligence , organic chemistry , image (mathematics)