Open AccessNonequilibrium the Microwave Plasma of Low Pressure in Scientific Researches and Development Micro and Nanoelectronics
Author(s) -
R. K. Yafarov
Publication year - 2015
Publication title -
izvestiâ saratovskogo universiteta. novaâ seriâ. seriâ fizika
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.163
H-Index - 2
eISSN - 2542-193X
pISSN - 1817-3020
DOI - 10.18500/1817-3020-2015-15-2-18-31
Subject(s) - nanoelectronics , microwave , plasma , non equilibrium thermodynamics , engineering physics , nanotechnology , materials science , physics , nuclear physics , thermodynamics , quantum mechanics