Open AccessThe main areas of using MEMS in the creation of space systems and their elements
Author(s) -
O.I. Atakishchev,
M.V. Tereshonok,
I.V. Atakishcheva,
А.В. Николаев
Publication year - 2020
Language(s) - English
DOI - 10.18411/lj-06-2020-46
Subject(s) - microelectromechanical systems , space (punctuation) , computer science , architectural engineering , engineering , materials science , nanotechnology , operating system