Open AccessTwo targets for magnetron deposition of highly entropic coatings
Author(s) -
V.М. Yurov,
С.А. Гученко,
A.N. Twardovsky
Publication year - 2020
Language(s) - English
DOI - 10.18411/lj-04-2020-07
Subject(s) - cavity magnetron , deposition (geology) , materials science , chemical engineering , sputter deposition , nanotechnology , chemical physics , chemistry , geology , engineering , thin film , sputtering , paleontology , sediment