Open AccessINTERNATIONAL INTERDISCIPLINARY CONFERENCE ON ADVANCED ELEMENT BASE OF MICRO- AND NANOELECTRONICS USING MODERN ACHIEVEMENTS OF THEORETICAL PHYSICS
Author(s) -
V. V. Belyaev
Publication year - 2020
Publication title -
vestnik moskovskogo gosudarstvennogo oblastnogo universiteta. seriâ fizika-matematika
Language(s) - English
Resource type - Journals
eISSN - 2310-7251
pISSN - 2072-8387
DOI - 10.18384/2310-7251-2020-2-57-63
Subject(s) - nanoelectronics , element (criminal law) , engineering ethics , base (topology) , nanotechnology , engineering physics , engineering , systems engineering , physics , materials science , political science , mathematics , mathematical analysis , law