Open AccessMicrorobots for wafer scale microfactory: design fabrication integration and control.
Author(s) -
Ruoshi Zhang
Publication year - 2021
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.18297/etd/3377
Subject(s) - automation , nanotechnology , engineering , manufacturing engineering , robot , factory (object oriented programming) , scale (ratio) , wafer , computer science , mechanical engineering , materials science , artificial intelligence , physics , quantum mechanics , programming language