Open AccessMicrorobots for wafer scale microfactory: design fabrication integration and control.
Author(s) -
Ruoshi Zhang
Publication year - 2020
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.18297/etd/3377
Subject(s) - automation , nanotechnology , engineering , nanorobotics , robot , factory (object oriented programming) , manufacturing engineering , wafer , scale (ratio) , computer science , mechanical engineering , materials science , artificial intelligence , physics , quantum mechanics , programming language
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