Open AccessDesign, simulation, and fabrication of silicon-on-insulator MEMS vibratory decoupled gyroscope
Author(s) -
Payal Verma,
V. S. Pavelyev,
Б. О. Володкин,
К. Н. Тукмаков,
A. S. Reshetnikov,
T. Andreeva,
Sergey A. Fomchenkov,
С. Н. Хонина
Publication year - 2016
Publication title -
kompʹûternaâ optika
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.491
H-Index - 29
eISSN - 2412-6179
pISSN - 0134-2452
DOI - 10.18287/2412-6179-2016-40-5-664-668-673
Subject(s) - deep reactive ion etching , gyroscope , microelectromechanical systems , silicon on insulator , vibrating structure gyroscope , fabrication , materials science , bandwidth (computing) , wafer , comb drive , capacitive sensing , optoelectronics , etching (microfabrication) , acoustics , electronic engineering , silicon , reactive ion etching , engineering , electrical engineering , physics , nanotechnology , layer (electronics) , aerospace engineering , medicine , alternative medicine , pathology , telecommunications