Open AccessPrecision laser recording on a molybdenum films for diffractive microrelief formation
Author(s) -
Алексей Васильевич Волков,
Олег Юрьевич Моисеев,
Сергей Дмитриевич Полетаев
Publication year - 2013
Publication title -
kompʹûternaâ optika
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.491
H-Index - 29
eISSN - 2412-6179
pISSN - 0134-2452
DOI - 10.18287/0134-2452-2013-37-2-220-225
Subject(s) - materials science , molybdenum , refractory metals , laser ablation , etching (microfabrication) , laser , substrate (aquarium) , thin film , optics , ablation , metal , optoelectronics , quartz , reactive ion etching , plasma , composite material , metallurgy , nanotechnology , oceanography , physics , engineering , layer (electronics) , quantum mechanics , aerospace engineering , geology