Open AccessPendeposisian Besi pada Subtrat Alumunium dengan Metode Sputtering Terhadap Variasi Suhu
Author(s) -
Handoyo Saputro
Publication year - 2016
Publication title -
jpse (journal of physical science and engineering)
Language(s) - Uncategorized
Resource type - Journals
ISSN - 2541-2485
DOI - 10.17977/um024v1i12016p029
Subject(s) - electrical resistivity and conductivity , analytical chemistry (journal) , materials science , substrate (aquarium) , aluminium , conductivity , sputtering , mineralogy , metallurgy , chemistry , thin film , physics , nanotechnology , geology , oceanography , chromatography , quantum mechanics