Experience in the Creation and Implementation of complex industry vacuum systems (based on devices and component parts eliminating movement friction and designed to work in the field of micro-and nano-electronics and other high-tech) | Zendy

В. А. Васин | Zendy

Open Access

Experience in the Creation and Implementation of complex industry vacuum systems (based on devices and component parts eliminating movement friction and designed to work in the field of micro-and nano-electronics and other high-tech)

Author(s) -

В. А. Васин

Publication year - 2008

Publication title -

izvestiya mgtu mami

Language(s) - English

Resource type - Journals

eISSN - 2949-1428

pISSN - 2074-0530

DOI - 10.17816/2074-0530-69742

Subject(s) - component (thermodynamics) , electronics , work (physics) , field (mathematics) , nano , mechanical engineering , movement (music) , computer science , engineering , electrical engineering , physics , mathematics , chemical engineering , acoustics , pure mathematics , thermodynamics

The article is devoted to creation of executive and switch complexes of vacuum technological equipment and contains the review of both the most widespread and the most prospective devices based on the principle of controlled elastic deformation.

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