Open AccessExperience in the Creation and Implementation of complex industry vacuum systems (based on devices and component parts eliminating movement friction and designed to work in the field of micro-and nano-electronics and other high-tech)
Author(s) -
В. А. Васин
Publication year - 2008
Publication title -
izvestiâ mgtu "mami"
Language(s) - English
Resource type - Journals
eISSN - 2949-1428
pISSN - 2074-0530
DOI - 10.17816/2074-0530-69742
Subject(s) - component (thermodynamics) , electronics , work (physics) , field (mathematics) , nano , mechanical engineering , movement (music) , computer science , engineering , electrical engineering , physics , mathematics , chemical engineering , acoustics , pure mathematics , thermodynamics
The article is devoted to creation of executive and switch complexes of vacuum technological equipment and contains the review of both the most widespread and the most prospective devices based on the principle of controlled elastic deformation.