Open AccessCapacitive Micromachined Ultrasonic Transducer (CMUT): Analytical Evaluation of Membranes Performance Under Fabrication Related Stress
Author(s) -
Fikret Yıldız
Publication year - 2018
Publication title -
kahramanmaraş sütçü imam universitesi mühendislik bilimleri dergisi
Language(s) - English
Resource type - Journals
ISSN - 1309-1751
DOI - 10.17780/ksujes.409395
Subject(s) - capacitive micromachined ultrasonic transducers , materials science , fabrication , wafer , ultrasonic sensor , capacitive sensing , transducer , membrane , microelectromechanical systems , surface micromachining , composite material , optoelectronics , acoustics , electrical engineering , piezoelectricity , engineering , chemistry , medicine , biochemistry , alternative medicine , physics , pathology