Open AccessCharacterization of Gallium Oxide/glass thin films grown by RF magnetron sputtering
Author(s) -
Soheil Mobtakeri,
Ebru Şenadım Tüzemen,
Ali Özer,
Emre Gür
Publication year - 2020
Publication title -
cumhuriyet science journal
Language(s) - English
Resource type - Journals
eISSN - 2587-246X
pISSN - 2587-2680
DOI - 10.17776/csj.780730
Subject(s) - gallium , thin film , materials science , scanning electron microscope , sputter deposition , amorphous solid , annealing (glass) , analytical chemistry (journal) , sputtering , substrate (aquarium) , oxide , dielectric , optics , optoelectronics , composite material , nanotechnology , metallurgy , crystallography , chemistry , chromatography , oceanography , geology , physics