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PROPRIEDADES ESTRUTURAIS, MECÂNICAS, TRIBOLÓGICAS E ESTABILIDADE TÉRMICA DE FILMES DE CARBONO AMORFO FLUORADO DEPOSITADOS POR PECVD
Author(s) -
MARCELO EDUARDO HUGUENIN MAIA DA COSTA
Publication year - 2005
Language(s) - Portuguese
Resource type - Dissertations/theses
DOI - 10.17771/pucrio.acad.6376
Subject(s) - materials science , physics

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