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PROPRIEDADES ESTRUTURAIS E MECÂNICAS DE FILMES FINOS DEPOSITADOS A PARTIR DE HEXAMETILDISSILAZANO POR PECVD
Author(s) -
NEILETH JOHANNA STAND FIGUEROA
Publication year - 2015
Language(s) - Portuguese
Resource type - Dissertations/theses
DOI - 10.17771/pucrio.acad.24214
Subject(s) - materials science

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