Open AccessDesign and Analysis of a Uniform Meander RF MEMS Switch
Author(s) -
K Sri Kavya C Leela Mohan
Publication year - 2021
Publication title -
türk bilgisayar ve matematik eğitimi dergisi
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.218
H-Index - 3
ISSN - 1309-4653
DOI - 10.17762/turcomat.v12i5.1057
Subject(s) - microelectromechanical systems , capacitive sensing , shunt (medical) , dielectric , voltage , materials science , meander (mathematics) , electrical engineering , electronic engineering , optoelectronics , engineering , mathematics , medicine , geometry , cardiology
This paper projected to uniform meander RF MEMS capacitive shunt switch design and analysis. The less pull in voltage is obtained in flexure type membrane by proposed RF MEMS Switch. The materials selection for the dielectric layer and beam is explained in this paper and also shown the performance depends on materials utilized for the design. The good isolation of -31dB is achieved for the pull-in voltage of 11.97V with a spring constant of 2.38N/m is produced by the switch and is obtained by the optimization process at a frequency of 38GHz.