Open AccessStudy on the Ignition Performance of TaN Transducer by Heat Treatment
Author(s) -
Xueming Ren
Publication year - 2021
Publication title -
converter
Language(s) - English
Resource type - Journals
ISSN - 0010-8189
DOI - 10.17762/converter.67
Subject(s) - transducer , materials science , ignition system , voltage , acoustics , electrical engineering , composite material , engineering , thermodynamics , physics
In order to obtain good TaN film transducer and reduce its ignition voltage, the influence of the setting position and cooling method of the heat treatment process on the TaN film transducer were compared and analyzed. By measuring the square resistivity, SEM and XRD, the performance of the film before and after heat treatment were characterized. The ignition voltage of the TaN film transducer was tested, and the results showed that the ignition voltage of the heat-treated TaN film transducer could be reduced a lot. It provided a technical way for the micro-energy of MEMS pyrotechnics.