Open AccessInfluence of Distribution Size of Micro Energy Director Array on Ultrasonic Precise Sealing of Polymer MEMS Device
Author(s) -
Miaomiao Zhang
Publication year - 2021
Publication title -
converter
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.104
H-Index - 1
ISSN - 0010-8189
DOI - 10.17762/converter.35
Subject(s) - ultrasonic sensor , microelectromechanical systems , materials science , embossing , wetting , polymer , acoustics , optoelectronics , composite material , physics
In order to improve the quality and precision of ultrasonic precision sealing of polymer MEMS device, micro energy director array was proposed on the sealing surface of polymer MEMS device, the influence of the distribution size of micro energy director array to ultrasonic precise sealing was studied. Based on the experiment of PMMA micro-pipe sealing, five kinds of micro energy directors with different distribution sizes were made on the sealing surface by hot embossing technique. The method of ultrasonic precise sealing based on efficiency’s feedback was used and the influence of micro energy director array’s distribution size on the quality of ultrasonic sealing was summarized through the observation on the rule of wetting behavior of micro energy director array.