Open AccessA Spectroscopic Differential Reflectometry Study of (100), (110), (111), (311), and (511) Silicon Surfaces
Author(s) -
S. Chongsawangvirod,
E.A. Irene
Publication year - 1991
Publication title -
carolina digital repository (university of north carolina at chapel hill)
Language(s) - English
DOI - 10.17615/yrjj-vy70
Subject(s) - reflectometry , differential (mechanical device) , silicon , materials science , optoelectronics , physics , computer science , time domain , computer vision , thermodynamics