Models for the oxidation of silicon | Zendy

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Models for the oxidation of silicon

Author(s) -

EA Lewis,

EA Irene

Publication year - 1986

Publication title -

carolina digital repository (university of north carolina at chapel hill)

Language(s) - English

DOI - 10.17615/yk6f-nb49

Subject(s) - silicon , materials science , environmental science , engineering physics , optoelectronics , engineering

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