Open AccessEffect Of Implantation Temperature On Damage Accumulation In Ar - Implanted GaN
Author(s) -
I.O. Usov,
N. Parikh,
D. B. Thomson,
R. F. Davis
Publication year - 2002
Publication title -
carolina digital repository (university of north carolina at chapel hill)
Language(s) - English
DOI - 10.17615/m20h-kg18
Subject(s) - materials science , ion implantation , chemistry , ion , organic chemistry