Effect Of Implantation Temperature On Damage Accumulation In Ar - Implanted GaN | Zendy

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Effect Of Implantation Temperature On Damage Accumulation In Ar - Implanted GaN

Author(s) -

N. Parikh,

Igor Usov,

R. F. Davis,

D. B. Thomson

Publication year - 2021

Publication title -

unc libraries

Language(s) - English

DOI - 10.17615/m20h-kg18

Subject(s) - materials science , ion implantation , chemistry , ion , organic chemistry

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