Open AccessFabrication of Sub-5 nm Nanochannels in Insulating Substrates Using Focused Ion Beam Milling
Author(s) -
Laurent Ménard,
James B. Ramsey
Publication year - 2011
Publication title -
carolina digital repository (university of north carolina at chapel hill)
Language(s) - English
DOI - 10.17615/34sv-t538
Subject(s) - fabrication , materials science , focused ion beam , nanotechnology , ion , ion beam , optoelectronics , chemistry , medicine , alternative medicine , organic chemistry , pathology