Open AccessElectron cyclotron resonance plasma and thermal oxidation mechanisms of germanium
Author(s) -
Y. Wang,
Y. Z. Hu,
E. A. Irene
Publication year - 1994
Publication title -
carolina digital repository (university of north carolina at chapel hill)
Language(s) - English
DOI - 10.17615/1cc0-nc36
Subject(s) - germanium , electron cyclotron resonance , plasma , cyclotron , cyclotron resonance , fourier transform ion cyclotron resonance , electron , atomic physics , materials science , nuclear magnetic resonance , chemistry , physics , nuclear physics , mass spectrometry , metallurgy , silicon , chromatography