Open AccessFinite Element Analysis of Membranes for MEMS Capacitive Pressure Sensors
Author(s) -
Venkata Saravanan,
R. Vinobakrishnan,
J. Mayandi
Publication year - 2016
Publication title -
international journal of engineering research and technology
Language(s) - English
Resource type - Journals
ISSN - 2278-0181
DOI - 10.17577/ijertv5is100299
Subject(s) - capacitive sensing , microelectromechanical systems , finite element method , membrane , materials science , pressure sensor , mechanical engineering , engineering , electrical engineering , optoelectronics , structural engineering , chemistry , biochemistry