Open AccessOptimization of Phosphoric Acid-Based Emitter Formation on Silicon Wafer
Author(s) -
Zon Fazlila Mohd Ahir,
Suhaila Sepeai,
Saleem H. Zaidi
Publication year - 2018
Publication title -
jurnal kejuruteraan
Language(s) - English
Resource type - Journals
eISSN - 2289-7526
pISSN - 0128-0198
DOI - 10.17576/jkukm-2018-si1(3)-02
Subject(s) - wafer , common emitter , phosphoric acid , silicon , materials science , optoelectronics , metallurgy