Open AccessFEM Analysis of Ultrasonic Transducer with Square and Circular Diaphragm
Author(s) -
Rashmi Sharma,
Rekha Agarwal,
Ashwani Kumar Dubey,
Anil Arora
Publication year - 2017
Publication title -
indian journal of science and technology
Language(s) - English
Resource type - Journals
eISSN - 0974-6846
pISSN - 0974-5645
DOI - 10.17485/ijst/2017/v10i30/115497
Subject(s) - capacitive micromachined ultrasonic transducers , transducer , finite element method , acoustics , ultrasonic sensor , materials science , deflection (physics) , microelectromechanical systems , fabrication , modal analysis , isotropy , diaphragm (acoustics) , capacitive sensing , voltage , piezoelectricity , multiphysics , vibration , microelectronics , electrical engineering , optics , structural engineering , engineering , physics , optoelectronics , medicine , alternative medicine , pathology