Open AccessEffect of Electroplated Gold Film on the Performance of a Piezoresistive Accelerometer with Stress Concentrated Tiny Beams
Author(s) -
R. Navya Sri,
V. Sivaprakash,
Ribu Mathew,
A. Ravi Sankar
Publication year - 2015
Publication title -
indian journal of science and technology
Language(s) - English
Resource type - Journals
eISSN - 0974-6846
pISSN - 0974-5645
DOI - 10.17485/ijst/2015/v8i19/76706
Subject(s) - proof mass , accelerometer , piezoresistive effect , cantilever , materials science , electroplating , finite element method , sensitivity (control systems) , microelectromechanical systems , optoelectronics , deflection (physics) , layer (electronics) , electronic engineering , acoustics , nanotechnology , computer science , composite material , structural engineering , optics , physics , engineering , operating system