Open AccessDesign of D.C. planer magnetron sputter for preparing copper-oxide thin films
Author(s) -
Mahdi Hasan Suhail
Publication year - 2011
Publication title -
indian journal of science and technology
Language(s) - Uncategorized
Resource type - Journals
eISSN - 0974-6846
pISSN - 0974-5645
DOI - 10.17485/ijst/2011/v4i12.6
Subject(s) - materials science , sputtering , sputter deposition , thin film , copper , substrate (aquarium) , cavity magnetron , refractive index , torr , copper oxide , molar absorptivity , optoelectronics , optics , analytical chemistry (journal) , metallurgy , nanotechnology , chemistry , physics , oceanography , chromatography , geology , thermodynamics