Open AccessThe role of nano particles (Si) in gate dielectric
Author(s) -
Aref Sadeghi Nik
Publication year - 2010
Publication title -
indian journal of science and technology
Language(s) - English
Resource type - Journals
eISSN - 0974-6846
pISSN - 0974-5645
DOI - 10.17485/ijst/2010/v3i6.16
Subject(s) - materials science , silicon , substrate (aquarium) , oxide , titanium , dielectric , titanium oxide , gate oxide , scanning electron microscope , nanotechnology , nano , silicon oxide , gate dielectric , optoelectronics , equivalent oxide thickness , thin film transistor , oxide thin film transistor , transistor , chemical engineering , composite material , electrical engineering , metallurgy , layer (electronics) , voltage , engineering , oceanography , silicon nitride , geology