Open AccessAn optimized high-sensitivity capacitive MEMS for blood pressure measurement
Author(s) -
Muniba Shaikh,
S. F. Kodad,
B. C. Jinaga
Publication year - 2008
Publication title -
indian journal of science and technology
Language(s) - English
Resource type - Journals
eISSN - 0974-6846
pISSN - 0974-5645
DOI - 10.17485/ijst/2008/v1i4.9
Subject(s) - capacitive sensing , sensitivity (control systems) , transducer , pressure sensor , materials science , microelectromechanical systems , piezoresistive effect , acoustics , chip , pressure measurement , optoelectronics , electronic engineering , electrical engineering , physics , engineering , mechanical engineering