Open AccessEFFECT OF THE N2/Ar FLOW RATIO ON THE MICROSTRUCTURE AND MECHANICAL PROPERTIES OF TiSiCN COATINGS
Author(s) -
Jin Wang,
Mengting Wang,
Yongqiang Wang,
Dayan Ma,
Hao Li
Publication year - 2021
Publication title -
materiali in tehnologije
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.27
H-Index - 25
eISSN - 1580-3414
pISSN - 1580-2949
DOI - 10.17222/mit.2021.213
Subject(s) - materials science , x ray photoelectron spectroscopy , microstructure , scanning electron microscope , tin , amorphous solid , coating , diffraction , grain size , sputter deposition , composite material , sputtering , metallurgy , analytical chemistry (journal) , chemical engineering , crystallography , nanotechnology , thin film , optics , chemistry , physics , chromatography , engineering
TiSiCN coatings were prepared with the multi-arc ion plating and magnetron sputtering technique. The effect of the N2/Ar flow ratio on the properties of TiSiCN coatings was studied using scanning electron microscopy (SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and a friction and wear tester (UMT-3). With an increase in the N2/Ar flow ratio, the number of large particles on the surface first increases and then decreases. The intensity of the TiN (200) diffraction peak increases gradually, while the grain size first decreases and then increases. A TiSiCN coating consists of Ti (N, C) nanocrystallites, amorphous SiC, Si3N4 and carbon. When the N2/Ar flow ratio is 5 : 1, the coating exhibits the highest hardness and excellent wear resistance.