Open AccessResearch of MEMS-generators of energy with the built-in charge
Author(s) -
Dragunov Valerii,
Loiko Danil
Publication year - 2016
Publication title -
sbornik naučnyh trudov ngtu
Language(s) - English
Resource type - Journals
ISSN - 2307-6879
DOI - 10.17212/2307-6879-2016-1-76-89
Subject(s) - microelectromechanical systems , charge (physics) , electrical engineering , engineering , engineering physics , mechanical engineering , physics , optoelectronics , particle physics