Open AccessFeatures of the electromechanical interactions in MEMS with a lateral displacement of non-parallel electrodes in the voltage controlled mode
Author(s) -
R.E. Sinitskiy,
V.P. Dragunov,
Igor E. Rudenko,
Dmitrii Koloskov,
Evgeniya Dragunova
Publication year - 2018
Publication title -
doklady akademii nauk vyšej školy rossijskoj federacii/doklady akademii nauk vysšej školy rossii
Language(s) - English
Resource type - Journals
eISSN - 2658-3747
pISSN - 1727-2769
DOI - 10.17212/1727-2769-2018-4-93-109
Subject(s) - microelectromechanical systems , electrode , displacement (psychology) , materials science , voltage , mode (computer interface) , optoelectronics , acoustics , electrical engineering , engineering , computer science , physics , psychology , quantum mechanics , psychotherapist , operating system